Sweeping the tilt angle can make improvements to film thickness uniformity and sidewall protection while also averting substantial energy-reflected neutral species for important processes.
IBSD normally takes location in a high vacuum ecosystem, minimizing noble gasoline inclusion from the deposited movie and improving the environmental stability on the coating.
Focus on rotation and carousel indexing Every have torque sense, protecting against any approach complications as a consequence of slips or jams in rotation.
In-situ ellipsometry supplies crucial info on the effectiveness of an optical film though it truly is staying deposited.
Our Reticle® ion beam sputter deposition methods are built and engineered to develop exact optical films of the best purity, density, and balance.
Variable angle stages allow for really strong skinny film strategies. Having said that, certainly one of its major difficulties is reproducibility. The substrate is frequently set at a very oblique angle in relation to your supply, as well as films are very sensitive for the precision of this angle.
Angstrom went to wonderful lengths to refine the tolerances of the lean angle, improving it from a variation of as many as a full diploma on non-Angstrom units I’ve utilized to below 0.
Typically, a QCM is used to calibrate an initial deposition amount ahead of finishing the layer thickness under time control with a fixed beam present. Shuttering the crystal will dramatically prolong its functioning lifetime during long processes or on methods with a load High-purity metal products lock.
IBSD processes also can hire a secondary ion resource for substrate cleaning and energetic assist, substrate heating for reactive deposition, As well as in-situ optical monitoring or ellipsometry for significant layer thickness termination.
All regular Reticle® platforms consist of a further gridless conclude-Hall ion resource with hollow cathode neutralizer.
The deposition ion resource is directed toward a cloth concentrate on that has been optimized in the two dimensions and place for that required deposition geometry.
Self-aligned ion optics are configured specifically for the desired deposition requirements and geometry of your procedure.
Angstrom Engineering’s Reticle® programs give a change-critical Remedy for the people looking to comprehend any optical style right into a superior-general performance film.
A shuttered QCM located close to the substrate supplies comments to the deposition fee and Actual physical thickness with the growing film.
Each axis of motion is controlled through Aeres® utilizing precision servo motors, giving a lot better than 0.1 levels of positional precision. Front facet infrared heating bulbs tilt With all the phase to deliver a regular temperature profile for reactive processes.